VACUUM EVAPORATION SOURCE WITH DOUBLE-WALL CYLINDRICAL GRAPHITE HEATER AND NOZZLE OUTLET

被引:2
作者
HEMMER, FJ
PIEDMONT, JR
机构
关键词
D O I
10.1063/1.1717778
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
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页码:1355 / &
相关论文
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DASILVA, EM .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1960, 31 (09) :959-960
[3]  
HOLLAND L, 1960, VACUUM DEPOSITION TH, P146
[4]  
HOLLAND L, 1960, VACUUM DEPOSITION TH
[5]  
HOLLAND L, 1960, VACUUM DEPOSITION TH, P167