NOVEL DEPOSITION TECHNIQUE OF A-SI-H - SILANE GLOW-DISCHARGE IN MAGNETIC-FIELD

被引：8

作者：

HAMASAKI, T

HIROSE, M

KURATA, H

TANIGUCHI, M

OSAKA, Y

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1981年 / 20卷 / 01期

关键词：

D O I：

10.7567/JJAPS.20S1.281

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：281 / 285

页数：5

共 16 条

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JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) :183-188

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