SOLID-STATE AMORPHIZATION IN AL-PT THIN-FILMS

被引：18

作者：

LEGRESY, JM

BLANPAIN, B

MAYER, JW

机构：

来源：

JOURNAL OF MATERIALS RESEARCH | 1988年 / 3卷 / 05期

关键词：

D O I：

10.1557/JMR.1988.0884

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：884 / 889

页数：6

共 17 条

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[2]

Chu W. K., 1978, BACKSCATTERING SPECT

[3] QUANTITATIVE-ANALYSIS OF THIN SPECIMENS [J].

CLIFF, G ;

LORIMER, GW .

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[4]

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[5] PHASE FORMATION AND DISSOCIATION IN THE THIN-FILM PT/AL SYSTEM [J].

COLGAN, EG .

JOURNAL OF APPLIED PHYSICS, 1987, 62 (04) :1224-1231

[6] VOID FORMATION IN THIN AL FILMS [J].

COLGAN, EG ;

LI, CY ;

MAYER, JW .

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[7]

COLGAN EG, 1987, THESIS CORNELL U

[8]

DAVIS LE, 1976, HDB AUGER ELECTRON S, P13

[9] ALGORITHMS FOR THE RAPID SIMULATION OF RUTHERFORD BACKSCATTERING SPECTRA [J].

DOOLITTLE, LR .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 9 (03) :344-351

[10]

LEGRESY JM, UNPUB

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