THICK-FILM HYDROCARBON-GAS SENSORS

被引:55
作者
LEE, DD [1 ]
CHOI, DH [1 ]
机构
[1] CHONGJU UNIV,DEPT SEMICOND ENGN,CHOONGCHUNG BUKDO,SOUTH KOREA
关键词
D O I
10.1016/0925-4005(90)80207-G
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
γ-Fe2O3 thick-film hydrocarbon gas sensors have been fabricated and their characteristics investigated. The sensitivity of a γ-Fe2O3 thick film without any other catalysts heat treated at 400 °C for 2 h is 70% in 1000 ppm C4H10 ambient at an operating temperature of 300 °C. The addition of Pd(1 wt.%) to γ-Fe2O3 enhances the sensitivity to butane gas. The sensitivity of γ-Fe2O3/SnCl4·5H2 O(0.5wt.%)/Pd(1wt.%) film heat treated at 400 °C for 2 h to 1000 ppm C4H10 is 80% at an operating temperature of 300 °C. © 1990.
引用
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页码:231 / 235
页数:5
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