Electro-optic probing of RF signals in submicrometre MMIC devices

被引：6

作者：

David, G ^{[1
]}

Bussek, P ^{[1
]}

Auer, U ^{[1
]}

Tegude, FJ ^{[1
]}

Jager, D ^{[1
]}

机构：

[1] UNIV DUISBURG GESAMTHCSH, FACHGEBIET HALBLEITERTECH, SONDERFORSCH BEREICH 254, D-47048 DUISBURG, GERMANY

来源：

ELECTRONICS LETTERS | 1995年 / 31卷 / 25期

关键词：

MMIC; microwave measurement;

D O I：

10.1049/el:19951465

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A high resolution electro-optic measurement system for probing RF electric field distributions in submicrometre MMIC devices is presented. As an example, field distributions in an interdigital structure are displayed, revealing a spatial resolution of much less than 0.5 mu m. This feature makes electro-optic probing a unique technique for circuit- and also device-internal measurements of electrical signals combining high bandwidth and noninvasiveness with submicrometre resolution.

引用

页码：2188 / 2189

页数：2

共 11 条

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