INVESTIGATION OF THE GROWN DIAMOND (100) SURFACE USING HIGH-RESOLUTION ELECTRON-ENERGY LOSS SPECTROSCOPY

被引:5
作者
SUN, BW [1 ]
ZHANG, XP [1 ]
ZHANG, QZ [1 ]
LIN, ZD [1 ]
机构
[1] CHINESE ACAD SCI,INST SEMICOND,BEIJING 100080,PEOPLES R CHINA
关键词
DIAMOND; METHANE; HYDROGEN;
D O I
10.1016/0025-5408(93)90081-N
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The diamond (100) facets deposited at initial 1.0% CH4 have been investigated using high resolution electron energy loss spectroscopy (HREELS). The diamond (100) facets grown at 800-degrees-C are terminated by CH2 radicals, and there is no detectable frequency shift compared with the characteristic frequencies of molecular subgroup CH2. Beside the CH2 vibration loss, CH bend loss (at 140 meV) of locally monohydrogenated dimer is detected for the diamond (100) facets grown at 1000-degrees-C. Dosing the (100) facets grown at 800-degrees-C with atomic hydrogen at 1*10(-6) mbar, the loss peak at 140 meV appears. It is suggested that there are enough separately vacant sites and uniformly dispersed monohydrogenated dimers on (100) facets. This structure relaxes the steric repulsion between the adjacent hydrogen atoms during the diamond (100) surface growth.
引用
收藏
页码:131 / 135
页数:5
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