YBA2CU3O7-DELTA THIN-FILMS DEPOSITED BY AN ULTRASONIC NEBULIZATION AND PYROLYSIS METHOD

被引：7

作者：

DESISTO, WJ ^{[1
]}

HENRY, RL ^{[1
]}

OSOFSKY, M ^{[1
]}

MARZIK, JV ^{[1
]}

机构：

[1] USA,MAT TECHNOL LAB,WATERTOWN,MA 02172

来源：

THIN SOLID FILMS | 1991年 / 206卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(91)90406-N

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

High T(c) superconducting Films of YBa2Cu3O7-delta were deposited by a novel chemical vapor deposition procedure. 1-butanol solutions of the volatile yttrium, barium and copper derivatives of 2,2,6,6-tetramethyl-3,5-heptanedione were ultrasonically nebulized and pyrolyzed onto MgO substrates at 430-degrees-C. The solutions were nebulized with "soft spray" ultrasonic nozzles operating at 60 and 120 kHz giving median droplet sizes of 19 and 10-mu-m respectively. Experimental parameters affecting film composition are discussed. The as-deposited films were poorly crystalline. Annealing the films in flowing argon at 830-degrees-C, was followed by a short anneal in O2 at 880-degrees-C and slow cooling in O2. The films were metallic with T(c) values as high as 80-81 K (R = 0). Films were characterized by X-ray diffraction, optical and scanning electron microscopy, elastic backscattering and transport measurements.

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页码：128 / 131

页数：4

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