MICROTOMOGRAPHY OF SEMICONDUCTOR CRYSTALS IN THE EBIC MODE

被引：9

作者：

BONDARENKO, IE

LIKHAREV, SK

RAU, EI

YAKIMOV, EB

机构：

[1] Institute of Microelectronics Technology and High Purity Materials, Academy of Sciences of the USSR, 142432, Chernogolovka, Moscow district

来源：

JOURNAL OF CRYSTAL GROWTH | 1990年 / 103卷 / 1-4期

关键词：

D O I：

10.1016/0022-0248(90)90189-R

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

The method of reconstruction of internal defect structure using computer processing of EBIC images is described. The efficiency of the method is evaluated by reconstruction of the model structure. The results of reconstruction of dislocation halfloops by this method are presented. © 1990.

引用

页码：197 / 199

页数：3

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