PRODUCTION OF SMOOTH DEPOSIT THICKNESS PROFILES AND HOMOGENEOUS ALLOYS FROM PARALLEL STRIP SOURCES

被引：4

作者：

DAHLGREN, SD

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1970年 / 41卷 / 12期

关键词：

D O I：

10.1063/1.1658576

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：5004 / &

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