ACTION OF ELECTRIC-FIELD ON FORMATION OF THIN-FILMS

被引：3

作者：

LEBAS, J

机构：

来源：

THIN SOLID FILMS | 1972年 / 10卷 / 01期

关键词：

ELECTRIC FIELD EFFECTS - FILMS - Growing - FILMS - Thin Films;

D O I：

10.1016/0040-6090(72)90274-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

During the initial stage of deposition, an evaporated metal film consists of a set of discrete islands electrically insulated. It is demonstrated in this paper that, if such a film is placed in an electrostatic field, electrostatic forces between the islands exist even if the islands were initially uncharged. If these forces are assumed to be attractive, it is possible to explain qualitatively the phenomena observed during the growth of a film in the presence of an electrostatic field in the plane of the substrate.

引用

页码：91 / &

共 12 条

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CHOPRA, KL .

JOURNAL OF APPLIED PHYSICS, 1966, 37 (06) :2249-&

[3]

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[4]

DURAND E, 1953, ELECTROSTATIQUE MAGN, P167

[5] INFLUENCE OF CHARGE EFFECTS ON GROWTH AND ELECTRICAL RESISTIVITY OF THIN METAL FILMS [J].

KENNEDY, DI ;

HAYES, RE ;

ALSFORD, RW .

JOURNAL OF APPLIED PHYSICS, 1967, 38 (04) :1986-&

[6]

KERN R, 1968, CR ACAD SCI B PHYS, V267, P142

[7]

LEBAS J, 1969, CR ACAD SCI B PHYS, V268, P1393

[8]

LEBAS J, 1971, THESIS ROUEN

[9]

MASSON A, 1968, CR ACAD SCI B PHYS, V267, P64

[10]

POCZA JF, 1967, 2ND P COLL THIN FILM, P93

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