EFFECT OF MEASURING CONDITIONS ON THE ACCURACY OF A SPINNING ROTOR GAUGE

被引：17

作者：

HIRATA, M

ISOGAI, H

ONO, M

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 03期

关键词：

D O I：

10.1116/1.573965

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1724 / 1727

页数：4

共 9 条

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[3]

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[4]

HOJO H, 1977, 7TH P INT VAC C 3RD, P117

[5] ZERO STABILITY OF SPINNING ROTOR VACUUM GAUGES [J].

MCCULLOH, KE ;

WOOD, SD ;

TILFORD, CR .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (03) :1738-1741

[6]

MESSER G, 1983, 9TH INT VAC C 5TH IN, P83

[7]

MESSER G, 1980, 8TH P INT VAC C CANN, P259

REICH, G .

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[9]

1967, ELECTRICAL ENG HDB, P1835