THE UNIVERSITY-OF-WISCONSIN X-RAY-LITHOGRAPHY BEAMLINE - 1ST RESULTS

被引：7

作者：

LAI, B

MITCHELL, G

WELLS, GM

CERRINA, F

机构：

来源：

关键词：

D O I：

10.1016/0168-9002(86)90173-7

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：681 / 686

页数：6

共 7 条

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Wiley, J.D.
Taylor, J.W.
[J]. Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, 1984, 3 (01): : 227 - 231
[2] CERRINA F, ME 84 P
[3] Hoh K., 1985, Microcircuit Engineering 84. International Conference Proceedings, P283
[4] KARNEZOS M, COMMUNICATION
[5] SHADOW - A SYNCHROTRON RADIATION RAY TRACING PROGRAM
LAI, B
CERRINA, F
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1986, 246 (1-3) : 337 - 341
[6] Mancini D., UNPUB
[7] REILLY M, COMMUNICATION