ZNS MOLECULAR-BEAM EPITAXY ON SILICON SUBSTRATES

被引:3
作者
YANG, YN
HICKEY, CF
GIBSON, UJ
机构
[1] Univ of Arizona, Tucson, AZ, USA, Univ of Arizona, Tucson, AZ, USA
关键词
MOLECULAR BEAM EPITAXY - SEMICONDUCTING SILICON - X-RAYS - Diffraction;
D O I
10.1016/0040-6090(87)90234-3
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We report on the deposition of ZnS films of high structural quality onto Si(100) substrates. Films with thicknesses from 0. 75 to 4 mu m were examined by X-ray diffraction in both the Bragg and Read configurations. The ZnS 400 peak in Cu K alpha //1 X-ray diffraction had a linewidth of 0. 04 degree -0. 06 degree , comparable with that of the silicon substrate. The high structural quality of these films suggests their use as buffer layers for II-VI device growth.
引用
收藏
页码:207 / 214
页数:8
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