LASER PROCESSING OF UHV-DEPOSITED THIN SILICON FILMS

被引：12

作者：

DEJONG, T

SMIT, L

KORABLEV, VV

TROMP, RM

SARIS, FW

机构：

来源：

APPLIED SURFACE SCIENCE | 1982年 / 10卷 / 01期

关键词：

D O I：

10.1016/0378-5963(82)90130-1

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

收藏

页码：10 / 20

页数：11

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