LOW-FREQUENCY TURBULENT TRANSPORT IN MAGNETRON PLASMAS

被引：55

作者：

SHERIDAN, TE

GOREE, J

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 03期

关键词：

D O I：

10.1116/1.576221

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1014 / 1018

页数：5

共 12 条

[1]

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[2]

PRESS WH, 1986, NUMERICAL RECIPES AR, pCH12

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[4] LANGMUIR PROBE CHARACTERIZATION OF MAGNETRON OPERATION [J].

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KAUFMAN, HR .

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[5]

ROSSNAGEL SM, 1988, J VAC SCI TECHNOL A, V5, P88

[6]

SCHMIDT G, 1979, PHYSICS HIGH TEMPERA, P222

[7] MULTICHANNEL BOXCAR-AVERAGED MEASUREMENTS OF PLASMA PARAMETERS MADE USING A DIGITAL STORAGE SCOPE [J].

SHERIDAN, TE ;

HAYES, MA .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1988, 59 (07) :1081-1084

[8] RF OSCILLATIONS IN DC PLANAR SPUTTERING MAGNETRONS [J].

SPENCER, AG ;

HOWSON, RP .

VACUUM, 1988, 38 (06) :497-498

[9]

Thornton J.A., 1978, THIN FILM PROCESS, V4, P75

[10] MAGNETRON SPUTTERING - BASIC PHYSICS AND APPLICATION TO CYLINDRICAL MAGNETRONS [J].

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