共 12 条
[1]
CHEN FF, 1984, INTRO PLASMA PHYSICS, P190
[2]
PRESS WH, 1986, NUMERICAL RECIPES AR, pCH12
[3]
CURRENT VOLTAGE RELATIONS IN MAGNETRONS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1988, 6 (02)
:223-229
[4]
LANGMUIR PROBE CHARACTERIZATION OF MAGNETRON OPERATION
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1986, 4 (03)
:1822-1825
[5]
ROSSNAGEL SM, 1988, J VAC SCI TECHNOL A, V5, P88
[6]
SCHMIDT G, 1979, PHYSICS HIGH TEMPERA, P222
[9]
Thornton J.A., 1978, THIN FILM PROCESS, V4, P75
[10]
MAGNETRON SPUTTERING - BASIC PHYSICS AND APPLICATION TO CYLINDRICAL MAGNETRONS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1978, 15 (02)
:171-177