LOW-FREQUENCY TURBULENT TRANSPORT IN MAGNETRON PLASMAS

被引:55
作者
SHERIDAN, TE
GOREE, J
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 03期
关键词
D O I
10.1116/1.576221
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
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页码:1014 / 1018
页数:5
相关论文
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