CURRENT VOLTAGE RELATIONS IN MAGNETRONS

被引:119
作者
ROSSNAGEL, SM [1 ]
KAUFMAN, HR [1 ]
机构
[1] FRONT RANGE RES,FT COLLINS,CO 80524
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 02期
关键词
D O I
10.1116/1.574985
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:223 / 229
页数:7
相关论文
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