A SPUTTERING WIND

[1] CAMBEL AB, 1961, HDB FLUID DYNAMICS

[2] CARTER G, 1968, ION BOMBARDMENT SOLI, P6

[3] SWARM ANALYSIS BY USING TRANSPORT-EQUATIONS .8. ELECTROPHORESIS IN A CYLINDRICAL POSITIVE-COLUMN [J]. JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1983, 52 (06) : 2025 - 2034

[4] STRESS AND PROPERTY CONTROL IN SPUTTERED METAL-FILMS WITHOUT SUBSTRATE BIAS [J]. THIN SOLID FILMS, 1983, 107 (04) : 353 - 358

[5] DESIGN AND CAPABILITIES OF A NOVEL CYLINDRICAL-POST MAGNETRON SPUTTERING SOURCE [J]. THIN SOLID FILMS, 1982, 96 (03) : 217 - 224

[6] HOFFMAN DW, 1982, 7TH P ICVM TOK, P145

[7] LANGMUIR J, 1923, J FRANKLIN I, V196, P751

[8] PATTERSON GN, 1971, INTRO KINETIC THEORY, P99

[9] ENERGETIC BINARY COLLISIONS IN RARE-GAS PLASMAS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02): : 185 - 188

[10] SOMEKH RE, 1984, J VAC SCI TECHNOL A, V2, P1285, DOI 10.1116/1.572396

[1] CAMBEL AB, 1961, HDB FLUID DYNAMICS

[2] CARTER G, 1968, ION BOMBARDMENT SOLI, P6

[3] SWARM ANALYSIS BY USING TRANSPORT-EQUATIONS .8. ELECTROPHORESIS IN A CYLINDRICAL POSITIVE-COLUMN [J]. JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1983, 52 (06) : 2025 - 2034

[4] STRESS AND PROPERTY CONTROL IN SPUTTERED METAL-FILMS WITHOUT SUBSTRATE BIAS [J]. THIN SOLID FILMS, 1983, 107 (04) : 353 - 358

[5] DESIGN AND CAPABILITIES OF A NOVEL CYLINDRICAL-POST MAGNETRON SPUTTERING SOURCE [J]. THIN SOLID FILMS, 1982, 96 (03) : 217 - 224

[6] HOFFMAN DW, 1982, 7TH P ICVM TOK, P145

[7] LANGMUIR J, 1923, J FRANKLIN I, V196, P751

[8] PATTERSON GN, 1971, INTRO KINETIC THEORY, P99

[9] ENERGETIC BINARY COLLISIONS IN RARE-GAS PLASMAS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02): : 185 - 188

[10] SOMEKH RE, 1984, J VAC SCI TECHNOL A, V2, P1285, DOI 10.1116/1.572396