ELASTIC RECOIL SELECTION BY PULSE-SHAPE ANALYSIS

被引：4

作者：

KLEIN, SS

RIJKEN, HA

TOLSMA, HPT

DEVOIGT, MJA

机构：

[1] Cyclotron Laboratory, 5600 MB Eindhoven

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1994年 / 85卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(94)95901-3

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Recoils ejected by alpha-particles are detected by low-resistivity detectors at low bias. Pulses from scattered alpha-particles that cross the depletion layer are rejected by pulse shape analysis. Using 500 OMEGA cm detectors the maximum pulse height recorded for alpha-particles corresponds to an energy of 4 MeV. Further suppression of pulses caused by alpha-particles awaits the construction of detectors optimized for operation at low bias as well as the development of faster electronics. Using a 13.4 MeV alpha-particle beam oxygen has been detected from layers as deep as 250 nm. Sensitivity was improved to 5 x 10(14) atoms/cm2 and a surface depth resolution of 12 nm was obtained for N in Si2N0.86O3. The depth range and sensitivity may be further improved using higher bombarding energies.

引用

页码：660 / 663

页数：4

共 6 条

[1] P-PARTICLE, D-PARTICLE AND ALPHA-PARTICLE DISCRIMINATION IN NRA - THIN, ADJUSTABLE SENSITIVE ZONE SEMICONDUCTOR-DETECTORS REVISITED [J].