LARGE-AREA AVALANCHE PHOTODIODES FOR THE DETECTION OF SOFT X-RAYS

被引:18
作者
GULLIKSON, EM [1 ]
GRAMSCH, E [1 ]
SZAWLOWSKI, M [1 ]
机构
[1] ADV PHOTONIX INC,CAMARILLO,CA 93012
来源
APPLIED OPTICS | 1995年 / 34卷 / 22期
关键词
07.85.1n; 29.40.Wk; 85.60.Dw;
D O I
10.1364/AO.34.004662
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The charge-collection efficiency of beveled-edge-type silicon avalanche photodiodes has been determined for soft x rays in the 50-300-eV range. An efficiency of greater than 80% is measured for energies below the Si L absorption edge. The measured efficiency is well described by a model that accounts for absorption in an oxide overlayer and recombination at the front surface of the diode. The avalanche photodiodes are shown to be significantly more sensitive compared with other detectors for pulsed sources such as a laser-produced plasma source. These results are also very encouraging for soft-x-ray/extreme-UV applications involving synchrotron radiation.
引用
收藏
页码:4662 / 4668
页数:7
相关论文
共 20 条
[1]   TIME-RESOLVED DETECTION OF X-RAYS USING LARGE-AREA AVALANCHE PHOTODIODES [J].
BARON, AQR ;
RUBY, SL .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1994, 343 (2-3) :517-526
[2]  
Edwards D. F., 1985, HDB OPTICAL CONSTANT, P547
[3]   HIGH-RESOLUTION, LOW-ENERGY AVALANCHE PHOTODIODE X-RAY-DETECTORS [J].
FARRELL, R ;
VANDERPUYE, K ;
ENTINE, G ;
SQUILLANTE, MR .
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1991, 38 (02) :144-147
[4]   FAST, HIGH-DENSITY AVALANCHE PHOTODIODE-ARRAY [J].
GRAMSCH, E ;
SZAWLOWSKI, M ;
ZHANG, S ;
MADDEN, M .
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1994, 41 (04) :762-766
[5]  
Gullikson E M, 1992, J Xray Sci Technol, V3, P283, DOI [10.1016/0895-3996(92)90016-D, 10.3233/XST-1992-3402]
[6]   ABSOLUTE PHOTOABSORPTION MEASUREMENTS OF MG, AL, AND SI IN THE SOFT-X-RAY REGION BELOW THE L2,3 EDGES [J].
GULLIKSON, EM ;
DENHAM, P ;
MROWKA, S ;
UNDERWOOD, JH .
PHYSICAL REVIEW B, 1994, 49 (23) :16283-16288
[7]  
GULLIKSON EM, 1994, P SOC PHOTO-OPT INS, V2283, P164, DOI 10.1117/12.193184
[8]   X-RAY INTERACTIONS - PHOTOABSORPTION, SCATTERING, TRANSMISSION, AND REFLECTION AT E=50-30,000 EV, Z=1-92 [J].
HENKE, BL ;
GULLIKSON, EM ;
DAVIS, JC .
ATOMIC DATA AND NUCLEAR DATA TABLES, 1993, 54 (02) :181-342
[9]  
Hovel H.J., 1975, SEMICONDUCTORS SEMIM, V11
[10]  
Huang C.M., 1991, P SOC PHOTO-OPT INS, V1447, P156