HYDROGEN-PLASMA AND PHOTO-EFFECTS ON MOMBE OF GAAS

被引:3
作者
SUEMUNE, I
HAMAOKA, K
KISHIMOTO, A
KOUI, T
HONDA, Y
YAMANISHI, M
机构
[1] Faculty of Engineering, Hiroshima University, 724, Shitami, Saijocho, Higashihiroshima
关键词
D O I
10.1016/0022-0248(91)90601-Z
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
[No abstract available]
引用
收藏
页码:1041 / 1042
页数:2
相关论文
共 3 条
[1]   NEW LOW-TEMPERATURE PROCESS FOR GROWTH OF GAAS ON SI WITH METALORGANIC MOLECULAR-BEAM EPITAXY ASSISTED BY A HYDROGEN PLASMA [J].
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[2]   LOW-TEMPERATURE GAAS EPITAXIAL-GROWTH USING ELECTRON-CYCLOTRON RESONANCE METALORGANIC-MOLECULAR-BEAM EPITAXY [J].
TANAKA, Y ;
KUNITSUGU, Y ;
SUEMUNE, I ;
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YAMANISHI, M .
JOURNAL OF APPLIED PHYSICS, 1988, 64 (05) :2778-2780
[3]   ON THE REACTION-MECHANISM OF THE PYROLYSES OF TMG AND TEG IN MOCVD GROWTH REACTORS [J].
TSUDA, M ;
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MORISHITA, M ;
MASHITA, M .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1987, 26 (05) :L564-L566