GROWTH OF STACKING-FAULTS BY BARDEEN-HERRING MECHANISM IN CZOCHARALSKI SILICON

被引:23
作者
WADA, K [1 ]
TAKAOKA, H [1 ]
INOUE, N [1 ]
KOHRA, K [1 ]
机构
[1] UNIV TOKYO, FAC ENGN, TOKYO 113, JAPAN
关键词
D O I
10.1143/JJAP.18.1629
中图分类号
O59 [应用物理学];
学科分类号
摘要
[No abstract available]
引用
收藏
页码:1629 / 1630
页数:2
相关论文
共 5 条
[1]  
DAIDO K, 1979, REV ELECTR COMMUN LA, V27, P433
[2]   GOLD-INDUCED DISLOCATION LOOPS IN SILICON CRYSTALS [J].
IIZUKA, T .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1966, 5 (11) :1018-&
[3]  
TAKAOKA H, 1979, JAPAN J APPL PHY S18, V18, P179
[4]   SURFACE DAMAGE AND COPPER PRECIPITATION IN SILICON [J].
THOMAS, DJD .
PHYSICA STATUS SOLIDI, 1963, 3 (12) :2261-2273
[5]   CIRCULAR STACKING-FAULTS IN SILICON [J].
TICE, WK ;
HUANG, TC .
APPLIED PHYSICS LETTERS, 1974, 24 (04) :157-158