EFFECT OF GRAIN-SIZE ON THE OXIDATION-KINETICS OF SPUTTERED TITANIUM NITRIDE FILMS

被引：8

作者：

THORPE, TP

MORRISH, AA

QADRI, SB

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 03期

关键词：

D O I：

10.1116/1.575279

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1727 / 1729

页数：3

共 10 条

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[8] ELECTRICAL AND OPTICAL-PROPERTIES OF SPUTTERED TINX FILMS AS A FUNCTION OF SUBSTRATE DEPOSITION TEMPERATURE [J].

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