DIFFRACTION GRATING CALIBRATION OF SCANNING TUNNELING MICROSCOPE PIEZOSCANNERS

被引：6

作者：

POIRIER, GE

WHITE, JM

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1990年 / 61卷 / 12期

关键词：

D O I：

10.1063/1.1141526

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A gold replica of a UV diffraction grating was imaged by scanning tunneling microscopy (STM) using both mechanically cut platinum and electrochemically etched W tips. The topographs are useful in calibrating x,y, and z piezocoefficients for STM piezoscanners.

引用

页码：3917 / 3918

页数：2