QUANTITATIVE-ANALYSIS OF LIGHT ELEMENTS (NITROGEN, CARBON, AND OXYGEN) IN SPUTTERED TANTALUM FILMS BY AUGER-ELECTRON SPECTROSCOPY AND SECONDARY ION MASS-SPECTROMETRY (SIMS)

被引：28

作者：

MORABITO, JM ^{[1
]}

机构：

[1] BELL TEL LABS INC,ALLENTOWN,PA 18103

来源：

关键词：

D O I：

10.1021/ac60338a026

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：189 / 196

页数：8

共 46 条

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