SELF-ALIGNED THIN-FILM STRUCTURES WITH 1000-A RESOLUTION

被引：13

作者：

HOWARD, RE

HU, EL

JACKEL, LD

机构：

来源：

APPLIED PHYSICS LETTERS | 1980年 / 36卷 / 02期

关键词：

D O I：

10.1063/1.91407

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：141 / 143

页数：3

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