DENSITY VARIATIONS IN MOLTEN SILICON DEPENDENT ON ITS THERMAL HISTORY

被引:20
作者
SASAKI, H
TOKIZAKI, E
TERASHIMA, K
KIMURA, S
机构
[1] Kimura Metamelt Project, ERATO, JRDC, Tsukuba Research Consortium Satellite 2, Tsukuba, 300-2
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1994年 / 33卷 / 11期
关键词
MOLTEN SILICON; MELT; PHYSICAL PROPERTY; DENSITY; ARCHIMEDEAN METHOD; CRYSTAL GROWTH; THERMAL HISTORY; CRUCIBLE; OXYGEN; QUARTZ; CARBON;
D O I
10.1143/JJAP.33.6078
中图分类号
O59 [应用物理学];
学科分类号
摘要
Time-dependent density variations in molten silicon held at 1452 degrees C for about 6 h depended on the thermal process prior to holding. A slow decrease was observed after melting and heating, but a slow increase followed cooling. Melt density reached the same stable value of 2.556 g/cm(3) after both variations. Reflecting this variation, the density of the melt measured during heating was slightly higher than that measured during cooling. The effect of the crucible material on melt density was also studied. With an SiO2 crucible, oxygen impurities of about 10(18) atoms/cm(3) were detected in the resolidified melt. The temperature dependence of the melt density was basically the same as for a SiC-coated graphite crucible, but the anomalous increase in melt density for temperatures near the melting point seemed to be slightly steeper.
引用
收藏
页码:6078 / 6081
页数:4
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