INTRINSIC EMISSION OF SECONDARY IONS FROM SILVER MAGNESIUM ALLOYS .2. MAGNESIUM EMISSION

被引:5
作者
HENNEQUIN, JF
BERNARD, JL
机构
[1] CNRS, Laboratoire PMTM, Université Paris-Nord, F-93430 Villetaneuse, Avenue Jean-Baptiste Clément
关键词
D O I
10.1016/0039-6028(90)90804-H
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Some Ag-Mg alloys, and pure Ag and Mg samples, were sputtered in ultrahigh vacuum with 10 keV Ar+ ions and the emission intensities of monoatomic Ag+, Mg+ and Mg2+ secondary ions were studied at a given initial energy as functions of the Mg concentration. The experimental procedure was detailed in part I of this study, where the measured Ag+ ion intensity ratio, normalized to pure silver, was found to be in good agreement with the value calculated after adjustment of the ionization probability by surface excitation to the experimental Ag+ ion energy spectrum from pure silver, taking into account the variations of the work function, of the sputtering yield and of the surface binding energy. However, secondary ions of light elements can also be produced by the collisional mechanism, i.e. by Auger de-excitation of excited atoms ejected outside the target with an inner electronic vacancy. In part II, the Mg2+ ion emission is shown to originate from the collisional process only, like the multicharged ionic species from other light elements. Both mechanisms contribute to the Mg+ ion emission and their respective sharing for initial energies between 20 and 400 eV can be deduced from the concentration dependence of the Mg+ ion intensity ratio, if the contribution of the ionization by surface excitation is assumed to be calculable by the same method as that used for Ag+ ions. © 1990.
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页码:287 / 294
页数:8
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