DIAMOND DEPOSITION WITH PLASMA-JET AT REDUCED PRESSURE

被引：18

作者：

FURUKAWA, R

UYAMA, H

MATSUMOTO, O

机构：

[1] Dept of Chem, Aoyama Gakuin Univ,, Setagaya-ku, Tokyo

来源：

IEEE TRANSACTIONS ON PLASMA SCIENCE | 1990年 / 18卷 / 06期

关键词：

D O I：

10.1109/27.61505

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

Carburizing and diamond deposition experiments were done on titanium, niobium, and molybdenum substrates with argon-methane-hydrogen gas mixture plasma jets at a pressure of 200 torr for various hydrogen concentrations. Diamond deposition was obtained at a volume of 7% hydrogen added to the plasma jet. The deposits were markedly different on the different metal substrates. Diamond deposits with habit planes were clearly observed on niobium and molybdenum, while the deposit on titanium consisted of ball-like particles. The emission spectra from the plasma jet were the same, for all the substrates, proving that the difference in the diamond deposit depends on the substrate characteristics. CH, C2, hydrogen, and carbon atoms were identified in the plasma jet. The difference in the deposits is attributed to the reactivity of carbon species in the plasma with the metal surface as well as to the solubility of hydrogen in metals.

引用

页码：930 / 933

页数：4

共 12 条

[1]

ESPE W, 1966, MATERIAL HIGH VACUUM, V1, P671

[2] CARBURIZING OF TITANIUM AND DIAMOND DEPOSITION ON TITANIUM IN ARGON-METHANE-HYDROGEN PLASMA-JET UNDER REDUCED PRESSURE [J].