NATURE OF THE NATIVE-DEFECT ESR AND HYDROGEN-DANGLING-BOND CENTERS IN THIN DIAMOND FILMS

The X-band ESR of thin diamond films deposited from a mixture of 99.5% H-2 and 0.5% CH4 is compared to those of films similarly prepared from D2-CD4 and H-2-(CH4)-C-13 mixtures. The main line and the satellites at +/-7.2 G are unaffected by annealing at T less-than-or-equal-to 1100-degrees-C, but their intensity is reduced upon an nealing at approximately 1500-degrees-C. Since the satellites are absent from the deuterated films, they are attributed to newly identified dangling-bond H centers, possibly on internal surfaces, but more plausibly embedded in the bulk. This is consistent with the C-13 relaxation rate, which indicates a uniform distribution of paramagnetic centers.