STATIC SECONDARY ION MASS-SPECTROMETRY OF ORGANIC PLASMA-DEPOSITED FILMS CREATED FROM STABLE ISOTOPE-LABELED PRECURSORS .2. MIXTURES OF ACETONE AND OXYGEN

A series of plasma-deposited films (PDFs), created by blending controlled ratios of acetone vapor and oxygen in the feed to the plasma reactor, were analyzed by static secondary ion mass spectrometry (SIMS). Examination of the quadrupole-based static SIMS fragmentation patterns of acetone-O2 PDFs created from C-13-labeled acetone generally allowed the hydrocarbon secondary ions to be distinguished from oxygen-containing secondary ions. These results were compared with those obtained via high-mass resolution time-of-flight (TOF)-SIMS. The identified secondary ions were then assigned structural attributes, based on comparison of the static SIMS spectra of the acetone-O2 PDFs with those of conventional hydrocarbon and oxygen-containing polymers. A preliminary investigation to unravel the mechanism of oxygen incorporation in the acetone-O2 PDFs from the two plasma feed components was undertaken through the analysis of PDFs created from 1,2,3 C-13(3),-acetone (O-16) vapor and O-18(2) gas.