DEPOSITION AND PROPERTIES OF RF MAGNETRON SPUTTERED NI0.6MN2.4O4

被引:15
作者
BALIGA, S
JAIN, AL
机构
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D O I
10.1016/0167-577X(89)90186-9
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T [工业技术];
学科分类号
08 ;
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页码:175 / 178
页数:4
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