HYDROGEN NEUTRALIZATION OF DOPANT IN P-TYPE GA0.47IN0.53AS

被引:7
作者
THEYS, B
JALIL, A
CHEVALLIER, J
HUBER, AM
GRATTEPAIN, C
HIRTZ, P
PAJOT, B
机构
[1] THOMSON CSF,LCR,F-91401 ORSAY,FRANCE
[2] UNIV PARIS 06,PHYS SOLIDE GRP,F-75251 PARIS 05,FRANCE
来源
PHYSICA B | 1991年 / 170卷 / 1-4期
关键词
D O I
10.1016/0921-4526(91)90156-9
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Diffusion of hydrogen has been performed in a series of zinc doped GaInAs layers using a RF hydrogen plasma. In highly doped (almost-equal-to 10(19)/cm3) materials, the free hole concentration decrease is accompanied by a significant increase of the hole mobility indicating a neutralization process of acceptors. Layers doped at a level of almost-equal-to 10(18)/cm3 turn to n-type after hydrogenation. We also show that the hydrogen solubility in this material is fixed by the free hole density rather than by the hydrogen plasma conditions.
引用
收藏
页码:421 / 425
页数:5
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