2-STEP ETCHING METHOD FOR FABRICATION OF FIBER PROBE FOR PHOTON SCANNING TUNNELING MICROSCOPE

被引:31
作者
PANGRIBUAN, T [1 ]
JAING, S [1 ]
OHTSU, M [1 ]
机构
[1] KANAGAWA ACAD SCI & TECHNOL,TAKATSU KU,KAWASAKI 213,JAPAN
关键词
SCANNING TUNNELING MICROSCOPE; OPTICAL FIBERS; ETCHING TECHNIQUES;
D O I
10.1049/el:19931317
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The authors propose a novel two-step etching method for fabricating a fibre probe, with good reproducibility, for a photon scanning tunnelling microscope. A fibre probe with a cladding diameter of 14mum and cone angle of 20-degrees was fabricated by adjusting the first-step etching time and the composition of the second-step etching solution.
引用
收藏
页码:1978 / 1979
页数:2
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