A PHOTON SCANNING TUNNELING MICROSCOPE USING AN ALGAAS LASER

被引：35

作者：

JIANG, S ^{[1
]}

TOMITA, N ^{[1
]}

OHSAWA, H ^{[1
]}

OHTSU, M ^{[1
]}

机构：

[1] NIKON INC,SHINAGAWA KU,TOKYO 140,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1991年 / 30卷 / 9A期

关键词：

OPTICAL MICROSCOPE; NM-RESOLUTION; NEAR-FIELD; TUNNELING PHOTON; EVANESCENT WAVE; SUBMICRON APERTURE; DIODE LASER; FIBER PROBE;

D O I：

10.1143/JJAP.30.2107

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A novel super-resolution photon scanning tunneling microscope (PSTM) using diode lasers and optical fibers was demonstrated to measure the samples with submicron structure in a noncontact and nondestructive manner. A reproducible method for fabrication of the fiber probe with the tip curvature radius of 80 nm is reported. The step with the height of 9 nm, optical disk with submicron-sized pits similar to moth-eye structure, and latex particles with 80 nm in diameter have been observed. To the best of our knowledge, this is the smallest particle size resolved by the PSTM.

引用

页码：2107 / 2111

页数：5

共 13 条

[1] Theory of diffraction by small holes
Bethe, HA
[J]. PHYSICAL REVIEW, 1944, 66 (7/8): : 163 - 182
[2] COLLECTION MODE NEAR-FIELD SCANNING OPTICAL MICROSCOPY
BETZIG, E
ISAACSON, M
LEWIS, A
[J]. APPLIED PHYSICS LETTERS, 1987, 51 (25) : 2088 - 2090
[3] BREAKING THE DIFFRACTION BARRIER - OPTICAL MICROSCOPY ON A NANOMETRIC SCALE
BETZIG, E
TRAUTMAN, JK
HARRIS, TD
WEINER, JS
KOSTELAK, RL
[J]. SCIENCE, 1991, 251 (5000) : 1468 - 1470
[4] SCANNING TUNNELING OPTICAL MICROSCOPY
COURJON, D
SARAYEDDINE, K
SPAJER, M
[J]. OPTICS COMMUNICATIONS, 1989, 71 (1-2) : 23 - 28
[5] COURJON D, 1990, APPL OPTICS, V29, P3741
[6] DURIG U, 1986, J APPL PHYS, V59, P3381
[7] MICROPATTERN MEASUREMENT WITH AN ATOMIC FORCE MICROSCOPE
FUJII, T
SUZUKI, M
MIYASHITA, M
YAMAGUCHI, M
ONUKI, T
NAKAMURA, H
MATSUBARA, T
YAMADA, H
NAKAYAMA, K
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (02): : 666 - 669
[8] MICROLENS FOR COUPLING A SEMICONDUCTOR-LASER TO A SINGLE-MODE FIBER
GHAFOORISHIRAZ, H
ASANO, T
[J]. OPTICS LETTERS, 1986, 11 (08) : 537 - 539
[9] JIANG S, 1990, 1990 P OEC 90 TOK, P170
[10] JIANG S, 1991, P CLEO 91 WASHINGTON, P420

← 1 2 →