OPTICAL-PROPERTIES OF PLASMA POLYMER-FILMS

被引：25

作者：

POLL, HU

MEICHSNER, J

ARZT, M

FRIEDRICH, M

ROCHOTZKI, R

KREYSSIG, E

机构：

[1] Technische Universität Chemnitz-Zwickau, 9010 Chemnitz, F B Physik, PSF 964, D-O

来源：

SURFACE & COATINGS TECHNOLOGY | 1993年 / 59卷 / 1-3期

关键词：

D O I：

10.1016/0257-8972(93)90114-4

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The thickness and the refractive index of thin polymer films were measured in situ during plasma polymerization of hexamethyldisiloxane (HMDSO) by ellipsometry. The actual gas composition resulting from the plasma chemical conversion of organic vapour was analysed by mass spectrometry. The gas composition influences both the deposition process and the film properties. The optical dispersion and transmittance of the deposited films were characterized by spectroscopic ellipsometry (visible range) and spectrometry (UV-visible-IR range) respectively. It was found that especially the refractive index can be varied over a wide range depending on the plasma conditions, and that films with graded refractive index can be produced-

引用

页码：365 / 370

页数：6

共 14 条

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