THE INTERACTION OF ULTRAVIOLET EXCIMER LASER-LIGHT WITH SODIUM TRISILICATE

被引：21

作者：

ESCHBACH, PA ^{[1
]}

DICKINSON, JT ^{[1
]}

LANGFORD, SC ^{[1
]}

PEDERSON, LR ^{[1
]}

机构：

[1] PACIFIC NW LAB, RICHLAND, WA 99352 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 05期

关键词：

D O I：

10.1116/1.576172

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2943 / 2951

页数：9

共 25 条

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