共 21 条
[21]
1979, 1468 INT CTR DIFFR D
PREPARATION OF YTTRIA-STABILIZED ZIRCONIA THIN-FILMS BY A SOL-GEL PROCEDURE USING ALKOXIDE PRECURSORS
被引：23
作者：
PESHEV, P
SLAVOVA, V
机构：
[1] Institute of General and Inorganic Chemistry, Bulgarian Academy of Sciences
关键词：
ZIRCONIA;
YTTRIA;
PROPOXIDES;
SILICON;
ISOPROPOXIDES;
SAPPHIRE;
SILICA;
ALUMINA;
GLASSES;
CERAMICS;
D O I：
10.1016/0025-5408(92)90091-D
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The preparation by a chemical method of thin yttria-stabilized zirconia (YSZ) films on substrates of single crystalline silicon and sapphire, optical silica glass and alumina ceramics has been investigated. A sol-gel procedure is used during which an isopropanol sol of Zr-propoxide and Y-isopropoxide along with ethyl aceto-acetate as a chelating agent and an equivalent amount of water is spin coated on the substrate. Well crystallized YSZ films are formed on the substrates after heat-treatment of the amorphous gel coatings. These films, having a thickness of 1200-1500 angstrom, are characterized by a very good adhesion to the substrate, the lack of cracks and, especially on silicon and silica glass substrates a ver smooth surface.
引用
收藏
页码：1269 / 1275
页数：7
相关论文