ZIRCONIUM SILICON-OXIDE FILMS FOR DURABLE SOLAR CONTROL COATINGS

Zirconium silicon oxide films were deposited by de reactive magnetron sputtering of Zr-Si alloy targets. The character and durability of these films were investigated. Thin film X-ray diffraction analyis showed that the film structure changed from crystalline to amorphous with an abrupt decrease of internal stress for an SiO2 content of more than 20 mol%. Reduction of friction due to the amorphous structure was related to an improved mechanical durability. Films with an SiO2 content of 30-90 mol% were favorable as a durable protection layer. Taber abrasion of a double-layer system (amorphous Zr-Si oxide/TiNx/glass) indicated that not only the reduction of friction but also the oxide thickness was a key factor for the improved mechanical resistance.