SURFACE CHARACTERIZATION OF ION-BEAM MODIFIED GRAPHITE

X-ray photoelectron spectroscopic (XPS) and scanning Auger electron microscopic (SAM) techniques were used to study graphite surfaces modified by the ion beams of oxygen, nitrogen, hydrogen, argon, and methane gases with varying energies from 0.2 to 1 kV. A wide variety of various surface functional groups consisting of C-O, C-N, and N-O was produced in a short period of time. Relative abundances of these functionalities were analyzed and correlated with the experimental parameters. The results indicated that ion species and energy are the dominant factors in the formation of surface functionalities, and that variation of the radiation time from 1 to 20 minutes, produces a marginal contribution to the concentrations of these surface groups. The effect of ion radiation onto existing surface functionalities was also examined. The ion beam process yields a uniform distribution of the implant elements throughout the modified surface.