INFLUENCE OF THERMAL SIO2 SURFACE CONSTITUTION ON ADHERENCE OF PHOTORESISTS

[1] BAIRD SS, 1963, C CLEAN SURFACES, P869

[2] CORRELATION BETWEEN WATER CONTACT ANGLE AND KPR ADHERENCE ON SIO2 SURFACES [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1965, 112 (04) : 457 - &

[3] Constitution of colloidal silica. [J]. TRANSACTIONS OF THE FARADAY SOCIETY, 1940, 36 : 0964 - 0972

[4] CUNNINGHAM JA, 1963, ELECTROCHEM TECHNOL, V1, P242

[5] GENERAL RELATIONSHIP FOR THERMAL OXIDATION OF SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1965, 36 (12) : 3770 - &

[6] EITEL W, 1954, PHYSICAL CHEMISTRY S, P342

[7] WETTING PROPERTIES OF ORGANIC LIQUIDS ON HIGH ENERGY SURFACES [J]. JOURNAL OF PHYSICAL CHEMISTRY, 1955, 59 (10) : 1097 - 1106

[8] ILER RK, 1957, COLLOID CHEMISTRY SI

[9] KISELER AV, 1960, VORGRAGE ORIGINAFASS, V2, P391

[10] KOELLING JG, 1965, J CHEM SOC, V1, P6

[1] BAIRD SS, 1963, C CLEAN SURFACES, P869

[2] CORRELATION BETWEEN WATER CONTACT ANGLE AND KPR ADHERENCE ON SIO2 SURFACES [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1965, 112 (04) : 457 - &

[3] Constitution of colloidal silica. [J]. TRANSACTIONS OF THE FARADAY SOCIETY, 1940, 36 : 0964 - 0972

[4] CUNNINGHAM JA, 1963, ELECTROCHEM TECHNOL, V1, P242

[5] GENERAL RELATIONSHIP FOR THERMAL OXIDATION OF SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1965, 36 (12) : 3770 - &

[6] EITEL W, 1954, PHYSICAL CHEMISTRY S, P342

[7] WETTING PROPERTIES OF ORGANIC LIQUIDS ON HIGH ENERGY SURFACES [J]. JOURNAL OF PHYSICAL CHEMISTRY, 1955, 59 (10) : 1097 - 1106

[8] ILER RK, 1957, COLLOID CHEMISTRY SI

[9] KISELER AV, 1960, VORGRAGE ORIGINAFASS, V2, P391

[10] KOELLING JG, 1965, J CHEM SOC, V1, P6