CHARACTERISTICS OF TOOL STEEL IMPLANTED WITH MULTIENERGY B+ AND SINGLE-ENERGY N2+ IONS

被引：15

作者：

OHTANI, S

MIZUTANI, Y

TAKAGI, T

机构：

[1] Ion Engineering Research Institute Corporation, Hirakata, Osaka, 573-01

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1993年 / 80-1卷 / pt 2期

关键词：

D O I：

10.1016/0168-583X(93)96136-Z

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

To improve the wear resistance of tool steel, multi-energy (30, 50, 90, 180 keV) B+ ions were implanted. This implantation was followed by single-energy (180 keV) N2+ ion implantation and annealing at 450-degrees-C for 3600 s. Distribution and states of the implanted atoms, hardness and wear properties were studied. It was found that boron could be homogeneously distributed using multi-energy implantation between the projected range of the minimum and maximum energy. Mono-energy implanted nitrogen in this steel was distributed nearly in a Gaussian profile, and redistributed along with boron after annealing. In XPS results, it was recognized that solely implanted boron combined with the iron, and it shifted in part to a B-N bond as a result of subsequent N2+ ion implantation. The friction coefficient of the steel was reduced and wear resistance was improved as a result of B+ and N2+ ion implantation.

引用

页码：336 / 339

页数：4

共 5 条

[1] TECHNIQUES AND EQUIPMENT FOR NON-SEMICONDUCTOR APPLICATIONS OF ION-IMPLANTATION [J].