MULTILAYER GRATINGS FOR THE SOFT-X-RAY REGION

被引：14

作者：

ANDRE, JM

SAMMAR, A

MALEK, CK

TROUSSEL, P

BAC, S

BARCHEWITZ, R

PARDO, B

BERROUANE, H

MORENO, T

LADAN, FR

RIVOIRA, R

SCHIRMANN, D

机构：

[1] LAB MICROSTRUCT & MICROELECTR,CNRS,F-92220 BAGNEUX,FRANCE

[2] CEA,CTR ETUD LIMEIL VALENTON,F-94195 VILLENEUVE ST GEO,FRANCE

[3] UNIV PARIS 11,UTILISAT RAYONNEMENT ELECTROMAGNET LAB,F-91405 ORSAY,FRANCE

[4] UNIV PARIS 11,INST OPT THEOR & APPLIQUEE,CNRS,F-91405 ORSAY,FRANCE

[5] UNIV AIX MARSEILLE 3,PHYS INTERACT PHOTONS MAT LAB,CNRS,URA 797,F-13397 MARSEILLE,FRANCE

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1992年 / 63卷 / 01期

关键词：

D O I：

10.1063/1.1143026

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

New x-ray optics based on multidimensional diffraction are now available and have specific properties and potentials. Some characteristics of multilayer laminar amplitude gratings are presented in this work and exemplified with Mo/C multilayer etched gratings (1000 lines/mm) and (4166 lines/mm) for use in the 250 eV region and the 1 keV, respectively. The fabrication, tests of the gratings, and modeling of their diffractive performances are reported. Possible applications are discussed.

引用

页码：1399 / 1403

页数：5

共 12 条

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