OPTICAL SENSING FOR PRESSURE IN A MEDIUM VACUUM REGION BY USING THE DRUM EFFECT

被引：4

作者：

INABA, S ^{[1
]}

HANE, K ^{[1
]}

机构：

[1] NAGOYA UNIV,DEPT ELECTR MECH ENGN,NAGOYA,AICHI 464,JAPAN

来源：

APPLIED OPTICS | 1992年 / 31卷 / 16期

关键词：

OPTICAL VACUUM GAUGE; DRUM EFFECT;

D O I：

10.1364/AO.31.002969

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Optical sensing for pressure in a medium vacuum region is investigated by measuring the resonance frequency for vibration caused by the drum effect for a polyethylene terephtharate plate.

引用

页码：2969 / 2970

页数：2

共 5 条

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[4] TEMPERATURE-DEPENDENCE OF RESONANT-FREQUENCY IN OPTICALLY-EXCITED DIAPHRAGMS [J].

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[5] OPTICALLY-EXCITED RESONANT DIAPHRAGM PRESSURE SENSOR [J].

UTTAMCHANDANI, D ;

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ELECTRONICS LETTERS, 1987, 23 (04) :152-153

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