FREQUENCY-DEPENDENCE OF A QUARTZ OSCILLATOR ON GAS-PRESSURE

被引：34

作者：

KOKUBUN, K

HIRATA, M

ONO, M

MURAKAMI, H

TODA, Y

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 06期

关键词：

D O I：

10.1116/1.573275

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

收藏

页码：2184 / 2187

页数：4

相关论文

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KOKUBUN, K
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NAKAYAMA, K
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (03): : 1742 - 1745
[3] HIRATA M, 1983, J VAC SOC JPN, V26, P526
[4] A BENDING AND STRETCHING MODE CRYSTAL-OSCILLATOR AS A FRICTION VACUUM GAUGE
KOKUBUN, K
HIRATA, M
MURAKAMI, H
TODA, Y
ONO, M
[J]. VACUUM, 1984, 34 (8-9) : 731 - 735
[5] LANDAU LD, 1959, FLUID MECHANICS, pCH2