SIZE EFFECT OF A QUARTZ OSCILLATOR ON ITS CHARACTERISTICS AS A FRICTION VACUUM GAUGE

被引：20

作者：

HIRATA, M

KOKUBUN, K

ONO, M

NAKAYAMA, K

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 03期

关键词：

D O I：

10.1116/1.573011

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1742 / 1745

页数：4

共 8 条

[1] BECKER W, 1960, VAKUUM TECHNIK, V9, P48
[2] DUSHMAN S, 1914, PHYS REV, V5, P212
[3] VIBRATING RIBBON PRESSURE GAUGE
HOBSON, JP
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1970, 7 (05): : 557 - &
[4] KIEFER H, 1955, Z ANGEW PHYS, V7, P48
[5] A BENDING AND STRETCHING MODE CRYSTAL-OSCILLATOR AS A FRICTION VACUUM GAUGE
KOKUBUN, K
HIRATA, M
MURAKAMI, H
TODA, Y
ONO, M
[J]. VACUUM, 1984, 34 (8-9) : 731 - 735
[6] DESIGN AND PERFORMANCE OF A QUARTZ OSCILLATOR VACUUM GAUGE WITH A CONTROLLER
ONO, M
HIRATA, M
KOKUBUN, K
MURAKAMI, H
TAMURA, F
HOJO, H
KAWASHIMA, H
KYOGOKU, H
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (03): : 1746 - 1749
[7] PACEY DJ, 1959, VACUUM, V39, P261
[8] SCHWARTZ HJ, 1956, VACUUM S T COMMITTEE, P37