LASER ETCHING OF LINBO3 IN A CL2 ATMOSPHERE

被引：27

作者：

BEESON, KW ^{[1
]}

HOULDING, VH ^{[1
]}

BEACH, R ^{[1
]}

OSGOOD, RM ^{[1
]}

机构：

[1] COLUMBIA UNIV,MICROELECTR SCI LABS,NEW YORK,NY 10027

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 02期

关键词：

D O I：

10.1063/1.341934

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：835 / 840

页数：6

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