LASER-DRIVEN CHEMICAL-REACTION FOR ETCHING LINBO3

[1] SUBMICROMETER PATTERNING BY PROJECTED EXCIMER-LASER-BEAM INDUCED CHEMISTRY [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (01): : 1 - 8

[2] REACTIVE ION ETCHING OF LINBO3 [J]. APPLIED PHYSICS LETTERS, 1981, 38 (11) : 907 - 909

[3] READY JF, 1971, EFFECTS HIGH POWER L, P88

[4] EFFICIENT OPTICAL-WAVEGUIDE COUPLER [J]. APPLIED OPTICS, 1980, 19 (05): : 790 - 801

[5] SRIRAM S, 1986, UNPUB SOC PHOTOOPTIC, V612

[6] TAMIR T, 1979, TOPICS APPLIED PHYSI, V7

[7] LASER ENHANCED ETCHING IN KOH [J]. APPLIED PHYSICS LETTERS, 1982, 40 (04) : 352 - 354

[8] ZHDANOVA VV, 1968, FIZ TVERD TELA+, V10, P1360

[1] SUBMICROMETER PATTERNING BY PROJECTED EXCIMER-LASER-BEAM INDUCED CHEMISTRY [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (01): : 1 - 8

[2] REACTIVE ION ETCHING OF LINBO3 [J]. APPLIED PHYSICS LETTERS, 1981, 38 (11) : 907 - 909

[3] READY JF, 1971, EFFECTS HIGH POWER L, P88

[4] EFFICIENT OPTICAL-WAVEGUIDE COUPLER [J]. APPLIED OPTICS, 1980, 19 (05): : 790 - 801

[5] SRIRAM S, 1986, UNPUB SOC PHOTOOPTIC, V612

[6] TAMIR T, 1979, TOPICS APPLIED PHYSI, V7

[7] LASER ENHANCED ETCHING IN KOH [J]. APPLIED PHYSICS LETTERS, 1982, 40 (04) : 352 - 354

[8] ZHDANOVA VV, 1968, FIZ TVERD TELA+, V10, P1360