TRUE DIFFUSION CURRENT OF SUBSTRATE IONS AS RATE-CONTROLLING FACTOR OF SURFACE FILM GROWTH

被引：1

作者：

FRANK, L ^{[1
]}

机构：

[1] CZECHOSLOVAK ACAD SCI, INST SCI INSTR, BRNO, CZECHOSLOVAKIA

来源：

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 1973年 / 15卷 / 01期

关键词：

D O I：

10.1002/pssa.2210150128

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：251 / 255

页数：5

共 17 条

[1] THEORY OF THE OXIDATION OF METALS [J].

CABRERA, N ;

MOTT, NF .

REPORTS ON PROGRESS IN PHYSICS, 1948, 12 :163-184

[2] IONIC DIFFUSION AT ALUMINUM-ALUMINUM OXIDE INTERFACE [J].

CHRISTIAN, JH ;

TAYLOR, HL .

JOURNAL OF APPLIED PHYSICS, 1967, 38 (10) :3843-+

[3] TRANSPORT PROCESSES IN THERMAL GROWTH OF METAL AND SEMICONDUCTOR OXIDE FILMS [J].

COLLINS, FC ;

NAKAYAMA, T .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1967, 114 (2P1) :167-+

[4] KINETICS AND MECHANISM OF OXIDATION OF SUPERPURITY ALUMINUM IN DRY OXYGEN .I. APPARATUS DESCRIPTION AND GROWTH OF AMORPHOUS OXIDE [J].

DIGNAM, MJ ;

FAWCETT, WR ;

BOHNI, H .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1966, 113 (07) :656-+

[5] DIRECT OBSERVATION OF OXIDATION OF ALUMINUM SINGLE-CRYSTAL SURFACES [J].

DOHERTY, PE ;

DAVIS, RS .

JOURNAL OF APPLIED PHYSICS, 1963, 34 (03) :619-&

[6] INFLUENCE OF INTERSTITIAL METAL IONS IN OXIDE FILM ON AL-AL203-METALCATHODE PROPERTIES [J].

FRANK, L .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1971, 5 (01) :269-&

[7] SCHOTTKY EMISSION AS A RATE-LIMITING FACTOR IN THERMAL OXIDATION OF METALS [J].

FROMHOLD, AT ;

COOK, EL .

PHYSICAL REVIEW LETTERS, 1966, 17 (24) :1212-&

[8] KINETICS OF OXIDE FILM GROWTH ON METAL CRYSTALS - ELECTRON TUNNELING AND IONIC DIFFUSION [J].

FROMHOLD, AT ;

COOK, EL .

PHYSICAL REVIEW, 1967, 158 (03) :600-&

[9] KINETICS OF OXIDE FILM GROWTH ON METAL CRYSTALS - ELECTRONIC AND IONIC DIFFUSION IN LARGE SURFACE-CHARGE AND SPACE-CHARGE FIELDS [J].

FROMHOLD, AT ;

COOK, EL .

PHYSICAL REVIEW, 1968, 175 (03) :877-&

[10] THIN TUNNELABLE LAYERS OF SILICON DIOXIDE FORMED BY OXIDATION OF SILICON [J].

GOODMAN, AM ;

BREECE, JM .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1970, 117 (07) :982-&

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