共 80 条
[71]
A POSITIVE, CHEMICALLY AMPLIFIED, AROMATIC METHACRYLATE RESIST EMPLOYING THE TETRAHYDROPYRANYL PROTECTING GROUP
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1991, 9 (06)
:3348-3356
[76]
WEBSTER OW, 1992, NEW METHODS POLYM SY, P1
[77]
WEI Y, 1987, POLYM PREPR AM CHEM, V28, P252