OPTICAL-STANDARD SURFACES OF SINGLE-CRYSTAL SILICON FOR CALIBRATING ELLIPSOMETERS AND REFLECTOMETERS

被引：79

作者：

YASUDA, T

ASPNES, DE

机构：

[1] North Carolina State Univ, Raleigh, United States

来源：

APPLIED OPTICS | 1994年 / 33卷 / 31期

关键词：

D O I：

10.1364/AO.33.007435

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We show that hydrogen-terminated (111) Si wafers prepared with NH4F-based treatments can serve as a calibration standard for ellipsometers and reflectometers.

引用

页码：7435 / 7438

页数：4